Electron Beam Power Supply
POWER SUPPLY
※ 표를 좌우로 슬라이드하여 이용하세요.
| Division | Data | |
|---|---|---|
| Input power | 3-phase 380V(±10%) | |
| 50Hz / 60Hz | ||
| Sine wave | ||
| Output | Accelerating Voltage : 4kV ~10kV | |
| Emission current : 0~ 1.0A | ||
| Maximum output : 10kW | ||
| Deflection | 270° | |
| Scan Frequency | X-SCAN : 48Hz | |
| Y-SCAN : 450Hz | ||
| Remote Controller : 1EA | ||
| EBG power supply : 1EA | ||
| Gun (270˚) | ||
| Component | Cable | Remote Cable : 1EA |
| HV Cable : 2EA | ||
| Sweep Cable : 1EA | ||
| Ground wire | ||
ION BEAM SOURCE
※ 표를 좌우로 슬라이드하여 이용하세요.
| Division | Data |
|---|---|
| Anode Voltage | 0 ~ 350V |
| Ion energy | 210eV |
| Ion wdistribution angle | 60˚ |
| Filament diameter | 0.375, 0.5mm |
| AFilament curren | 14 ~ 26A |
| Filament material | Tungsten |
| Anode cooling water flow | Not less than 2ℓ/min |
| Scan Frequency | X-SCAN : 48Hz |
| Anode current | 0.8 ~ 15A |
| Recommended gas flow | 6 ~ 40sccm |
| Dimension | 139mm(D)*264mm(H)V |
| Input voltage | AC220V |
관련제품
LOW VACUUM PUMP
LOW VACUUM PUMP
HIGH VACUUM PUMP / OIL DIFFUSION
TMP-X4304LM
TMP-X4304LM
Electron Beam Source 180°
Electron Beam Source 270°
Electron Beam Source 270°
Deposition Controller
Cooling machine
특수제작 및 주문형 지그 시스템
