모든 IVT KOREA의 고성능 멀티 코팅기는 고객 주문형으로도 선택이 가능하며, 고객의 선택 사양에 IVT KOREA의 기술을 접목하여 균일하고 안정적인 초정밀 코팅이 가능한 시스템을 설계합니다.
언제든 문의주세요.
적용범위
Mobilephone case
Mobilephone camera
Mobilephone battery cover
Digital camera window
Hydrophobic coating
Metarl Mirror
Touch screen
사양
| CHAMBER SIZE | Ø1500 X H 1430 | |
|---|---|---|
| Low Pumping System | Rotary Pump |
E2M275 (50Hz) 292m3h-1/172ft3min-1 (60Hz) 350m3h-1/206ft3min-1 |
| Booster Pump |
EH2600 2,600m3h-1 |
|
| High Pumping System | Diffusion Pump |
24"×2sets Option (Turbo Pump) |
| Meissner Trap |
Polycold |
|
| Ion Beam Source | Up to 40~350V and 15A(Ar and O2) | |
| Electron Beam Source | 10kV / 1000mA / 270° / 4~32 Pocket | |
| Substrate Fixture | Optional : Single, Segment Dome(3/4) | |
| Substrate Heating | Halogen Heater Up to 250°C | |
| Deposition Control |
XTC3S (6 MHz Single Head) IC6 (6 MHz SIX Head) |
|
| Optical Thickness Monitoring(optional) | OPM | |
| Vacuum Gauge |
High Vacuum 1SET Low Vacuum 2SET |
|
| Control System | AIT (Process Control & Monitor -PC System (24Inch Touch) | |
| CHAMBER SIZE | Ø2050 X H1680 | |
|---|---|---|
| Low Pumping System | Rotary Pump |
E2M275 (50Hz) 292m3h-1/172ft3min-1 (60Hz) 350m3h-1/206ft3min-1 |
| Booster Pump |
EH2600 2,600m3h-1 |
|
| High Pumping System | Diffusion Pump |
28"×2sets Option (Turbo Pump) |
| Meissner Trap |
Polycold |
|
| Ion Beam Source | Up to 40~350V and 15A(Ar and O2) | |
| Electron Beam Source | 10kV / 1000mA / 270° / 4~32 Pocket | |
| Substrate Fixture | Optional : Single, Segment Dome(3/4) | |
| Substrate Heating | Halogen Heater Up to 250°C | |
| Deposition Control |
XTC3S (6 MHz Single Head) IC6 (6 MHz SIX Head) |
|
| Optical Thickness Monitoring(optional) | OPM | |
| Vacuum Gauge |
High Vacuum 1SET Low Vacuum 2SET |
|
| Control System | AIT (Process Control & Monitor -PC System (24Inch Touch) | |
| CHAMBER SIZE | Ø2700 X H1680 | |
|---|---|---|
| Low Pumping System | Rotary Pump |
nES750 m3h-1/ cfm 755 / 444 |
| Booster Pump |
EH4200 (50Hz) 4140m3h-1/2440ft3min-1 (60Hz) 4985m3h-1/2935ft3min-1 |
|
| High Pumping System | Diffusion Pump |
36"×2sets |
| Meissner Trap |
Polycold |
|
| Ion Beam Source | Up to 40~350V and 15A(Ar and O2) | |
| Electron Beam Source | 10kV / 1000mA / 270° / 4~32 Pocket | |
| Substrate Fixture | Calotte Diameter 2,500mm | |
| Substrate Heating | Halogen Heater Up to 250°C | |
| Deposition Control |
XTC3S (6 MHz Single Head) IC6 (6 MHz SIX Head) |
|
| Optical Thickness Monitoring(optional) | OPM | |
| Vacuum Gauge |
High Vacuum 1SET Low Vacuum 2SET |
|
| Control System | AIT (Process Control & Monitor -PC System (24Inch Touch) | |
코팅설비 기술과 서비스
재료(Materials) 선정
디자인 및 코팅(Design & Coating)
측정 및 분석 (Measurement & Analysis)
코팅 서비스 (coating service)
설비 (측정기 및 코팅설비)
